Introductory MEMS: fabrication and applications

‘Introductory MEMS: Fabrication and Applications’ is a practical introductionto MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailedlook at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. ‘Introductory MEMS: Fabrication and Applications’ is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduatelevel across academic disciplines One of the first texts written that is accessible to undergraduate technical majors regardless of specific discipline Describes sensors, actuators, and microfluidics, and their relationship with MEMSIncludes laboratory exercises designed to facilitate student learning about the basic microfabrication processes Provides review questions and problems at the end of each chapter to summarize learning objectives INDICE: Introduction.- Building MEMS by Adding Material – Additive Techniques.- Creating Patterns – Lithography.- Making MEMS by Taking Material Away – Bulk Micromachining.- Making MEMS by adding Material and Taking Away Some of It – Surface Micromachining.- Actuation and Sensing.- Process Flow.- Differential Analytic Modeling.- Finite Element Analysis(FEA) Modeling – FEMLAB.- Introduction to Microfluidics.

• ISBN: 978-0-387-09510-3
• Editorial: Springer
• Encuadernacion: Cartoné
• Páginas: 550
• Fecha Publicación: 01/12/2008
• Nº Volúmenes: 1
• Idioma: Inglés