Fundamentals of Vacuum Science and System Design for High and Ultra-High Vacuum: Design, Operation and Safety

Fundamentals of Vacuum Science and System Design for High and Ultra-High Vacuum: Design, Operation and Safety

Gaines, J.R.
Healy, Matthew

164,32 €(IVA inc.)

Fundamentals of Vacuum Science and System Design for High and Ultra-High Vacuum: Design, Operation and Safety details important and practical considerations surrounding the design of vacuum systems for various vacuum deposition technologies. Topics covered include the vacuum and end uses, molecular density in vacuums, molecular flow in various vacuum regimes, characteristics of gas composition at various molecular densities, general principles of gas-solid interactions, vacuum pump technology, pressure sensors, leak detection and the impact of fundamental design decisions and operating practices on vacuum system performance. The book's introductory sections are designed to introduce the reader to basic concepts in vacuum technology. More detailed sections provide fundamental descriptions of basic vacuum pumps and pumping mechanisms in current practice, with system design, assembly, maintenance and troubleshooting are reviewed. In addition, the book provides a wide range of pressure measurement approaches and includes several key characterization techniques and example applications on systems for rough vacuum, high vacuum and ultra-high vacuum, as well as tradeoffs surrounding system design. Covers vacuum pump technology, taking a system from atmosphere down to high or ultra-high vacuum Discusses the fundamental descriptions of vacuum pumps and pumping mechanisms in current practice and provides insight into the various pros and cons for each approach Provides an overview of practical vacuum system operating techniques that will ensure optimal performance and troubleshooting methods to identify system deficiencies INDICE: SECTION 1 Fundamentals of Vacuum Science 1. Introduction and Background 2. Developing an Understanding of Pressure and Vacuum 3. An Overview of Vacuum Systems 4. The Importance of Vacuum 5. The Movement of Gases in Vacuum Systems SECTION 2 System Design for Deposition Processes 6. Materials and an Introduction to Vacuum System Design 7. Passive Components Used in Vacuum System Design 8. Production and Measurement of Vacuum: The Active Components of Vacuum Systems 9. System Considerations Based on Deposition Process 10. System Cleanliness 11. Testing and Modelling 12. Safety and Practical Considerations 13. Putting It All Together SECTION 3 Appendices 14. Charts and tools for: Unit conversions, pump selection, gauge selection materials requirements, etc. 15. Residual gas analysis 16. Equilibrium vapor pressure 17. Material deposition chart 18. Molecular density and pressure

  • ISBN: 978-0-12-823392-4
  • Editorial: Elsevier
  • Encuadernacion: Rústica
  • Páginas: 550
  • Fecha Publicación: 01/02/2023
  • Nº Volúmenes: 1
  • Idioma: Inglés