Precision nanometrology: sensors and measuring systems for nanomanufacturing

Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attentionto the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: error separation algorithms and systemsfor measurement of straightness and roundness, the measurement of micro-aspherics, systems based on scanning probe microscopy, and scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing. Presents the techniques and basics of precision nanotechnology for nanoscale manufacturing - Includes methods for reducing Abbe errors in various Systems - Describes applications of nanoscale motion-control and nanoscale machining INDICE: 1. Angle Sensor for Measurement of Surface Slope and Tilt Motion.-2. Laser Autocollimator for Measurement of Multi-axis Tilte Motion.- 3. Surface Encoder for Measurement of In-plane Motion.- 4. Grating Encoder for Measurement of In-plane and Out-of-plane Motion.- 5. Scanning Multi-probe System for Measurement of Roundness.- 6. Scanning Error Separation System for Measurementof Straightness.- 7. Scanning Micro-stylus System for Measurement of Micro-aspherics.- 8. Large Area Scanning Probe Microscope for Micro-textured Surface.-9. Automatic Alignment Scanning Probe Microscope System for Measurement of 3DNanostructure.- 10. Scanning Image-sensor System for Measurement of Micro-dimension.

• ISBN: 978-1-84996-253-7
• Editorial: Springer
• Encuadernacion: Cartoné
• Páginas: 355
• Fecha Publicación: 28/06/2010
• Nº Volúmenes: 1
• Idioma: Inglés