Micromechanical devices are of great interest for a wide variety of applications, such as inertial sensing, biological/chemical sensing, projection display, biomedical imaging, and wireless communications. Design of Micromechanical Devices provides a comprehensive and in-depth description of the design and modeling of micromechanical devices from mechanical structural components, integrated transducers, to electromechanical system-level models upon which their interface circuits can be designed. Comprehensive description and extensive examples of the basic theories underlying micromechanical devices including staticmotion, resonant vibrations, electrical circuits, transduction, mechanisms, and electromechanical system-level modeling Extensive real-world typical configuration examples drawn from torsion mirrors, oscillators, accelerometers, and gyroscopes INDICE: Introduction to micromechanical devices.- Micromachining technology.- Continuum mechanics.- Motion of mechanical structures.- Transduction mechanisms.- Overview of electrical systems.- Electromechanical system-level models.- Experimental techniques and interface circuits.
- ISBN: 978-0-387-46279-0
- Editorial: Springer
- Encuadernacion: Cartoné
- Páginas: 400
- Fecha Publicación: 01/02/2009
- Nº Volúmenes: 1
- Idioma: Inglés