Nanofabrication and nanotechnology present a great challenge to engineers andresearchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. Micro and Nanomanufacturing provides acomprehensive treatment of established micro and nanofabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn about: Manufacturing and fabrication techniques at the micro and nanoscales; Using bulk and surface micromachining techniques, LiGA, and deep x-ray lithography to manufacture semiconductors; Producingmaster molds with micromachining; The deposition of thin films, pulsed water drop machining, and nanomachining. Provides a thorough knowledge of design andfabrication of nano and micro devices Applies production and research lab techniques to a variety of materials Discusses thin film deposition, pulsed waterdrop machining and other techniques INDICE: Principles of Micro- and Nanofabrication. Microfabriaction Using X-Ray Lithography. Manufacturing High Aspect Ration Microstructures. Meso-Micromachining. Mechanical Micromachining. Microgrinding. Diamond Micro Cutting Tools. Laser Micro- and Nanofabrication. Micromachining Using Water Droplets. Diamond Nanogrinding. Nanomachining. Micro-and Nanomanufacturing.
- ISBN: 978-0-387-25874-4
- Editorial: Springer
- Encuadernacion: Cartoné
- Páginas: 702
- Fecha Publicación: 01/01/2008
- Nº Volúmenes: 1
- Idioma: Inglés