Precision motion control: design and implementation

Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g., scanning probe microscopy), and robot/machine tools to carry out micro-assembly (e.g., micro-electro-mechanical systems) and delicate short-wavelength laser processes. Precision Motion Control (second edition) focuses on enabling technologiesfor precision engineering - issues of direct importance to be addressed in the overall system design and realization: precision instrumentation and measurement, geometrical calibration and compensation, and motion control. It is a compilation of the most important results and publications from a major project that develops a state-of-the-art, high-speed, ultra-precision robotic system.

• ISBN: 978-1-848000-20-9
• Editorial: Springer
• Encuadernacion: Cartoné
• Páginas: 272
• Fecha Publicación: 01/01/2008
• Nº Volúmenes: 1
• Idioma: Inglés