Research and development in the area of Power MEMS has been driven by the need for compact power sources with high energy and power density. The seminal research in the field has been conducted at Massachusetts Institute of Technology (MIT). ‘Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines’ describes the collaboration and research that was developed to produce the MIT Gas Turbine Engine. The MIT Gas Turbine Engine is intended to be a power MEMS device that will produce 10 Watts or more of electrical power from a shirt-button-sized package. This device is a gas-turbine engine that drives anintegrated electric generator. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book will discuss the technical details that have gone into producingthe engine and the overall systems-level tradeoffs and decisions that have been made. Describes how turbine generators, motor compressors, rocket motors and combustors have been used as energy sources at the MEMS scale Discusses in great detail how to model and manage systems-level trade-offs in complex MEMS devices using the gas turbine engine, and in particular its motor compressors and turbine generators INDICE: From the contents Objectives Of The Book. Possible/Target Applications. Major Challenges and Solutions...What Is Hard And Why. Book Overview.- System Overview of Major Devices. Micro Engine. Micro Rocket. Turbo Charger. Turbine/Generator and Motor/Compressor.- Materials, Structures and Packaging. Materials selection, including scaling of strength. Prababilistic Design for Room Temperature Structures. Elevated Temperature Design. Si/SiC Hybrid Structures. Packaging. Summary.- Fabrication. Overview. MicroEngine Fabrication Challenges and Solutions. Integration Challenges and Solutions. Summary.- Magnetic Structures in Silicon. Basic Principles/Structures. Challenges for Magnetic Structures. Coils. Soft Magnets. Hard Magnets. Laminations. Integration in Multi-Wafer Silicon Process. Summary.
- ISBN: 978-0-387-77746-7
- Editorial: Springer
- Encuadernacion: Cartoné
- Páginas: 600
- Fecha Publicación: 01/06/2008
- Nº Volúmenes: 1
- Idioma: Inglés