Microelectromechanical Systems (MEMS) hold out the hope for the next major breakthrough in the silicon revolution that started with the transistor in the 1960s and has revolutionized microelectronics. MEMS allow one not only to observe and process information of all types from small scale systems on the order of the size of a human hair, but also to affect changes in systems and the environment at that scale. RF MEMS Switches and Integrated Switching Circuits builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on RF MEMS switches and micromachined switching circuits, and presents a unified framework of coverage; including but not limited to RF MEMS approaches, developments from RF MEMS switchesto RF switching circuits, and MEMS switch components to MEMS switching circuit systems. Presents RF Switches and switching circuit MEMS devices in a unified framework covering all aspects of engineering innovation, design, modeling, fabrication, control and experimental implementation Discusses in detail RF switch devices, with both system and component-level circuit integration using micro- and nano-fabrication techniques Includes actual experimental results with the end commercial products in mind INDICE: Introduction.- Lateral DC Contact Switch.- Broadband Capacitive Switch.- Micromachined Coplanar Waveguide (CPW) Transmission Line.- Integrated Micromachined Switch Circuits.- Tunable Electromagnetic Bandgap (EBG) Bandstop Filter.- Tunable Bandpass Filter.- Deep Etching and Wafer Bonding Process.- Surface Micromachining Process.- Mechanical Design and Properties of RF Switches.- Dynamic Analysis and Modeling of RF Switches.- Conclusions.- Index.
- ISBN: 978-0-387-46261-5
- Editorial: Springer
- Encuadernacion: Cartoné
- Páginas: 300
- Fecha Publicación: 01/05/2009
- Nº Volúmenes: 1
- Idioma: Inglés