Plasma nanoscience: basic concepts and applications of deterministic nanofabrication

Filling the need for a major reference source specifically addressing the useof plasma for the fabrication of nanoscale structures, Plasma Nanoscience: Basic Concepts and Applications of Deterministic Nanofabrication begins with an introductory overview before addressing surface preparation, generation and diagnostics, transport, and the manipulation of nano units. The book will appealto solid state physicists, materials scientists, solid state chemists, and plasmaphysicists, as well as libraries. INDICE: 1.Introduction. 1.1.Overview of plasma processing at micro- and nanoscales. 1.2.Current problems and challenges. 2.What makes the plasma a versatile nanofabrication tool? 2.1.Plasma nanofabrication concept. 2.2.Basic plasma features for fabrication at nano-scales. 2.3.Choice and generation of working units. 2.4.Sheath-related features. 3.Working units: generation and diagnostics. 3.1.Subnanometer-sized working units. 3.2.Nanocluster and macromolecular working units. 3.3.Nanoparticles: working units of contaminants? 4.Surface preparation for nanoscale assemblies. 4.1.General requirements: nanostructure ordering and growth conditions. 4.2.Surface preparation in the growth of common nanostructures. 4.3.Pre-patterning in fabrication of ordered nanostructure arrays. 4.4.Overview of plasma-assisted pattern transfer to solid surfaces. 5.Transport, manipulation, and deposition of working units. 5.1.Transport and manipulation of working units. 5.2.Working units at work: interaction with solid surfaces.

• ISBN: 978-3-527-40740-8
• Editorial: Verlag Chemie
• Encuadernacion: Cartoné
• Páginas: 450
• Fecha Publicación: 23/07/2008
• Nº Volúmenes: 1
• Idioma: Inglés