Clearly structured, the introductory part of this first book on ALD provides a great insight into all aspects of the technique, while the second part focuses on nanomaterials and fields of application. As a result, readers and users are led from the fundamental processes and uses of the technique to building nanostructures in various important fields of academic and industrial significance. INDICE: PART 1: INTRODUCTION TO ATOMIC LAYER DEPOSITION (ALD) General Introduction to ALD and New Challenges Theroretical Modeling of ALD Processes New Chemical Approaches to ALD Polymer and Hybrid ALD (MLD) Low Temperature ALD Processes PART 2: NANOSTRUCTURES BY ATOMIC LAYER DEPOSITION ALD in Microelectronics Patterning and Linear Structures Coating of High Aspect Ratio Structures Coatings of Nanoparticles Coatings of Soft Materials Coatings of Carbon Nanotubes Inverse Opals and Photonics Optical Nanolaminates ALS on Biological Materials
- ISBN: 978-3-527-32797-3
- Editorial: Wiley-VCH
- Encuadernacion: Cartoné
- Páginas: 472
- Fecha Publicación: 07/12/2011
- Nº Volúmenes: 1
- Idioma: Inglés