Scanning electron microscopy: physics of image formation and microanalysis

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imagingand analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information. INDICE: Introduction.- Electron optics of a Scanning Electron Microscope.-Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.-

• ISBN: 978-3-540-85317-6
• Editorial: Springer
• Encuadernacion: Cartoné
• Páginas: 511
• Fecha Publicación: 01/10/2013
• Nº Volúmenes: 1
• Idioma: Inglés