Handbook of cleaning in semiconductor manufacturing: fundamental and applications

This comprehensive volume provides an in-depth discussion of the fundamentalsof cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal aspects of wet processing. Formulation development practices and methodologyare presented along with the applications for preventing copper corrosion, cleaning aluminum lines, and other sensitive layers. This is a must-have reference for any engineer or manager associated with using or supplying cleaning andcontamination free technologies for semiconductor manufacturing

• ISBN: 978-0-470-62595-8
• Editorial: John Wiley & Sons
• Encuadernacion: Cartoné
• Páginas: 614
• Fecha Publicación: 17/12/2010
• Nº Volúmenes: 1
• Idioma: Inglés